Nneɛma a wɔyɛ

Quartz Nkratafa a Ɛnyɛ Daa

Semiconductor Vent Cleaning (Nnwumakuw no Edin a Wɔtaa De Di Dwuma) .

Ventilator = Purge Mfɛnsere (Cavity Optical Mfɛnsere).

"Ventilator" nyɛ wafer ahotew, nanso ɛyɛ semiconductor mfiri fã regeneration ahotew (spare part siesie) afuw, titiriw etching / PVD / CVD mfiri cavity siesie beae, ɛnyɛ wafer nhyehyɛe ahotew.

Wo ne yɛn nni nkitaho

Nea ɛyɛ a Vent?

Quartz optical window a ɛwɔ etching anaa PECVD cavity so, a wɔde nitrogen purging gas kwan a ɛwɔ mfɛnsere no akyi ahyɛ mu. Saa gas ntama yi siw nneɛma a wɔde yɛ adwuma no kwan sɛ ɛnkɔ quartz no ani a ɛma hann no so. Wɔ adwumayɛbea kasa mu no, wɔfrɛ no vent anaa purge window.

- Nneɛma: Fused silica a ɛho tew kɛse (ebinom de sapphire di dwuma), mpɛn pii no ne nsusuwii a ɛnteɛ a ɛyɛ polygonal/octagonal, a ɛwɔ frosted anoano ne afã abien polishing;

- a wode si plasma cavity no afã/atifi so ma endpoint detection spectral acquisition ne infrared thermometry;

- wo dwumadie no mu no, wobetumi de silicon-based polymers ne fluoride deposits akata so, atew hann a ɛkɔ so no so na ɛkanyan mfiri alarm. Ɛsɛ sɛ woyi fi hɔ, siesie, na wɔsan yɛ no foforo —eyi yɛ mframa a wɔde ma ho a wɔhohoro.

Nnwumayɛbea Dwumadibea

Nnwumakuw Kɛse

Pɛpɛɛpɛ regeneration/spare part cleaning of semiconductor mfiri afã horow (ɛyɛ mfiri siesie (MRO) dea, ɛnyɛ wafer adwumayɛ titiriw no fã)
Nnwinnade dan a ɛne no hyia

Dry etching (Etch) > PECVD/CVD thin film deposition equipment, a ɛyɛ ade titiriw a ɛwɔ preventative maintenance a production line PMs yɛ mu.
Asubɔnten no atifi ne Asubɔnten no ase

Wafer fab mfiri dwumadibea → Nnipa a wɔto so abiɛsa a wɔsan yɛ foforo ne ahotew adwuma a wɔde ma → Quartz component manufacturer (Yɛyɛ upstream spare part manufacturing)

Akyisɛm a ɛfa Vent Cleaning wɔ Production Line no so

Bere a wɔreyɛ etching no, adeyɛ no ma polymer byproducts pii ba, na ebinom kɔ quartz vent no mu:

1 Nneɛma a ɛyɛ den a wɔde asie no brɛ UV spectral sɛnkyerɛnne no ase, na ɛde etching endpoint detection a ɛnteɛ ba na ɛde wafer scrapping ba tẽẽ;

2 Nneɛma nketenkete no yiyi na ɛtɔ wafer no ani, na ɛde aba no mu sintɔ ba;

3 Wɔ production line PM nsiesie mu no, wɔyi vent no na wɔde kɔma sɛ wɔnsan nyɛ no foforɔ na wɔmfa nsiesie de yi deposit layer no, san de hann no kɔ, na wɔma kwan ma wɔsan de di dwuma bio, na ɛtew spare part a wɔbɛtɔ ho ka so.

Nsonsonoe a ɛda Purge Window ne Regular Viewport ntam

Nsɛm a Wɔakyerɛkyerɛ Mu Titiriw

	Purge Mfɛnsere no	Viewport a Wɔyɛ no Daa
Nhyehyɛeɛ	Na nitrogen purge mframa ntama ntam	Quartz mfɛnsere a wɔatoto mu a ɛnyɛ den, mframa kwan biara nni hɔ a wɔde tew ho
Abisadeɛ	Endpoint detection, ɔhyew susuw optical kwan (core optics) .	Aniwa a wɔde hwɛ abura no mu
Efĩ dodow a ɛwɔ nipadua no mu	High, process byproducts bata ho mmerɛw yiye	Ɛyɛ hare kakra
Mpɛn dodow a wɔhohoro nneɛma ho	Wɔtaa paapae atching cavity a ɛkorɔn no mu na wɔhohoro ho	Fam
Bɔbea	Nneɛma pii a ɛnyɛ pɛpɛɛpɛ: ahinanan, ahinanan pii (wo ade) .	Dodow no ara yɛ kurukuruwa, ahinanan

Nneɛma a wɔde kyekyere nneɛma ne Nneɛma a Wɔde Kɔma

Nea Enti a Wobɛpaw Kesee Fam Apuei Quartz?

Southeast Quartz de ne ho to quartz a ɛyɛ papa a ɛkorɔn a ɛwɔ Donghai Mantam mu no so, ɛde ne ho hyɛ quartz ahwehwɛ a wɔyɛ no kɔ akyiri mu kɛse, na abɛyɛ ade titiriw a ɛde wiase nyinaa adetɔfo ma. Nneɛma nyinaa yɛ sɔhwɛ ahorow pii te sɛ helium mass spectrometry leak detection, pressure resistance test, ne ahotew sɔhwɛ ansa na wɔafi adwumayɛbea hɔ de ahwɛ ahu sɛ ɛyɛ adwuma yiye, efĩ biara nni hɔ, na ɛnyɛ nea ɛretu.