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Premium Quartz Boat for High Temperature Processes

Quartz boats are made of high-purity quartz, with regular structure, high temperature resistance and excellent chemical stability. They are specially designed to support silicon wafers and other workpieces, and are widely used in high-temperature processes such as diffusion and annealing in the semiconductor and photovoltaic industries. They are key fixtures for wafer processing.

    Quartz Boat Introduction

    Material: High-purity fused silica (SiO2 content ≥99.99%)

    Core Features

    1. Exceptional Thermal Performance

    With a high melting point of 1700°C and excellent thermal shock resistance, it withstands rapid temperature changes from -40°C to 1200°C without cracking, ideal for high-temperature heating processes.

    1. Superior Chemical Inertness

    Resistant to corrosion by most acids, alkalis, and organic solvents (except hydrofluoric acid and hot concentrated phosphoric acid), ensuring no contamination to processed materials.

    1. High Purity & Low Impurity

    Ultra-low metal impurity content (ppm level) prevents ion migration and contamination, meeting the strict purity requirements of semiconductor, photovoltaic, and laboratory applications.

    1. Smooth Surface & Precision Machining

    Polished surface with Ra ≤0.5μm reduces material adhesion and facilitates easy cleaning; customized dimensional tolerance (±0.1mm) ensures perfect fit with equipment.

    1. Mechanical Stability

    Good mechanical strength and rigidity at high temperatures, not easy to deform or break during long-term use, with a long service life.

     

    Typical Applications

    • Semiconductor Industry:Wafer cleaning, diffusion, oxidation, and ion implantation processes for silicon wafer handling.
    • Photovoltaic (PV) Industry: Solar cell silicon wafer sintering, coating, and texturing processes.
    • Laboratory Research: Sample heating, calcination, and chemical synthesis in high-temperature furnaces (muffle furnace, tube furnace).
    • Optical & Electronic Industry: Processing and annealing of optical glass, ceramic parts, and electronic components.

    Customization Options

    • Shapes: Rectangular, U-shaped, V-shaped, grooved (1-100 slots), and special customized structures.
    • Sizes: Length 50mm-2000mm, width 20mm-300mm, thickness 2mm-20mm (customizable per customer drawings).
    • Surface Treatment: Polished, frosted, or acid-etched surface.

          Accessories: Quartz support rods, baffles, and lids for integrated solutions.

    Packaging & Quality Assurance

      • Packaging: Anti-static foam + shockproof carton + wooden case (for large/bulk orders) to prevent damage during transportation.
      • Quality Control: 100% inspection for dimensional accuracy, surface quality, and thermal performance; provide material certification and test reports.