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Quartz Irregular Shaped Sheets

Semiconductor Vent Cleaning (Industry Common Name)

Ventilator = Purge Window (Cavity Optical Window).

"Ventilator" is not wafer cleaning, but belongs to the semiconductor equipment component regeneration cleaning (spare part maintenance) field, specifically the etching/PVD/CVD equipment cavity maintenance area, not wafer process cleaning.

What is a Vent?

A quartz optical window on an etching or PECVD cavity, equipped with a nitrogen purging gas path on the back of the window. This gas curtain blocks process byproducts from depositing on the quartz's light-transmitting surface. In factory parlance, it's called a vent or purge window.

- Material: High-purity fused silica (some use sapphire), often irregularly shaped polygonal/octagonal, with frosted edges and double-sided polishing;

- Installed on the sidewall/top of the plasma cavity for endpoint detection spectral acquisition and infrared thermometry;

- During the process, it can be covered by silicon-based polymers and fluoride deposits, reducing light transmittance and triggering equipment alarms. It needs to be removed, cleaned, and regenerated—this is ventilator cleaning.

Industry Sector

Major Sector

Precision regeneration/spare part cleaning of semiconductor equipment components (belongs to equipment maintenance (MRO), not part of the main wafer manufacturing process)
Corresponding Equipment Chamber

Dry etching (Etch) > PECVD/CVD thin film deposition equipment, a crucial part of preventative maintenance by production line PMs.
Upstream and Downstream

Wafer fab equipment department → Third-party regeneration and cleaning service provider → Quartz component manufacturer (We belong to upstream spare part manufacturing)

Background of Vent Cleaning on the Production Line

During etching, the reaction generates a large amount of polymer byproducts, some of which deposit on the inner surface of the quartz vent:

① Thick deposits attenuate the UV spectral signal, leading to inaccurate etching endpoint detection and directly causing wafer scrapping;

② Particles peel off and fall onto the wafer surface, causing yield defects;

③ During production line PM maintenance, the vent is removed and sent for regeneration and cleaning to remove the deposit layer, restore light transmission, and allow for reuse, reducing spare part procurement costs.

Difference between Purge Window and Regular Viewport

Key Specifications

	Purge Window	Regular Viewport
Structure	With nitrogen purge air curtain interface	Simple sealed quartz window, no purge air path
Application	Endpoint detection, temperature measurement optical path (core optics)	Visual observation of the cavity
Contamination level	High, process byproducts adhere very easily	Relatively light
Cleaning frequency	High, etching cavity is frequently disassembled and cleaned	Low
Shape	Many irregular shapes: octagonal, polygonal (your product)	Mostly round, square

Packaging and Shipping

Why Choose Southeast Quartz?

Southeast Quartz relies on the superior high-quality quartz ore resources in Donghai County, deeply engages in the deep processing of quartz glass, and has become a core supplier to global customers. All products undergo multiple tests such as helium mass spectrometry leak detection, pressure resistance test, and purity test before leaving the factory to ensure stable performance, no impurities, and no leakage.