Quartz Boat

Premium Quartz Boat for High Temperature Processes

Quartz boats are made of high-purity quartz, with regular structure, high temperature resistance and excellent chemical stability. They are specially designed to support silicon wafers and other workpieces, and are widely used in high-temperature processes such as diffusion and annealing in the semiconductor and photovoltaic industries. They are key fixtures for wafer processing.

A quartz boat is a wafer carrier used in semiconductor and photovoltaic high-temperature processes, made from high-purity fused silica (SiO₂). It is designed with multiple slots to hold silicon wafers in a fixed arrangement inside furnace tubes.

Material: High-purity fused silica (SiO2 content ≥99.99%)

Product Description

Typical Applications

Semiconductor Industry:Wafer cleaning, diffusion, oxidation, and ion implantation processes for silicon wafer handling.
Photovoltaic (PV) Industry: Solar cell silicon wafer sintering, coating, and texturing processes.
Laboratory Research: Sample heating, calcination, and chemical synthesis in high-temperature furnaces (muffle furnace, tube furnace).
Optical & Electronic Industry: Processing and annealing of optical glass, ceramic parts, and electronic components.

Packaging & Quality Assurance

Packaging: Anti-static foam + shockproof carton + wooden case (for large/bulk orders) to prevent damage during transportation.
Quality Control: 100% inspection for dimensional accuracy, surface quality, and thermal performance; provide material certification and test reports.

Core Advantages

Exceptional Thermal Performance

With a high melting point of 1700°C and excellent thermal shock resistance, it withstands rapid temperature changes from -40°C to 1200°C without cracking, ideal for high-temperature heating processes.
Superior Chemical Inertness

Resistant to corrosion by most acids, alkalis, and organic solvents (except hydrofluoric acid and hot concentrated phosphoric acid), ensuring no contamination to processed materials.
High Purity & Low Impurity

Ultra-low metal impurity content (ppm level) prevents ion migration and contamination, meeting the strict purity requirements of semiconductor, photovoltaic, and laboratory applications.
Smooth Surface & Precision Machining

Polished surface with Ra ≤0.5μm reduces material adhesion and facilitates easy cleaning; customized dimensional tolerance (±0.1mm) ensures perfect fit with equipment.
Mechanical Stability

Good mechanical strength and rigidity at high temperatures, not easy to deform or break during long-term use, with a long service life.

Customization Options

Shapes	Rectangular, U-shaped, V-shaped, grooved (1-100 slots), and special customized structures.
Sizes	Length 50mm-2000mm, width 20mm-300mm, thickness 2mm-20mm (customizable per customer drawings).
Surface Treatment	Polished, frosted, or acid-etched surface.
Accessories	Quartz support rods, baffles, and lids for integrated solutions.

Packaging and Shipping

Why Choose Southeast Quartz?

Southeast Quartz relies on the superior high-quality quartz ore resources in Donghai County, deeply engages in the deep processing of quartz glass, and has become a core supplier to global customers. All products undergo multiple tests such as helium mass spectrometry leak detection, pressure resistance test, and purity test before leaving the factory to ensure stable performance, no impurities, and no leakage.