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3-port Quartz Bubbler / Quartz Source Bottle / Wet Oxygen Bottle

This product is a three-port bubbler source bottle manufactured from high-purity fused silica (SiO₂ ≥ 99.99%) via integrated welding. It consists of a bottle body and a quartz lid equipped with three quartz dip tubes. Serving as a critical high-purity vessel for semiconductor, photovoltaic diffusion, MOCVD, and laboratory gas-phase reaction processes, it is designed to hold liquid precursors or wet-oxygen media; by bubbling carrier gas through the liquid to generate vapor, it ensures a stable gas supply. It can also function as a reaction vessel or a gas washing bottle.

Structural Specifications

Vessel Body: Conical or cylindrical transparent quartz chamber; allows for visual monitoring of liquid levels; manufactured via integrated thermal processing; leak-proof design.

Top Lid: Thick-walled flat quartz lid; precision-fitted to the vessel body.

Three Quartz Dip Tubes: One central large-diameter tube and two side tubes (smaller diameter); lengths and inner/outer diameters are customizable; designated for gas inlet, gas outlet, and spare/temperature monitoring ports; insertion depth can be tailored to specific process requirements.

Core Material Properties

Ultra-high Purity

SiO₂ ≥ 99.99%; extremely low metal impurity levels; introduces no contaminants to the process; suitable for semiconductor wafer manufacturing.
High-Temperature Resistance

Long-term operating temperature of 1100–1200°C; resistant to thermal shock; unlikely to crack during rapid heating or cooling cycles.
Chemical Inertness

Resistant to corrosion from strong acids and strong oxidizing agents (excluding hydrofluoric acid); compatible with POCl₃, wet oxidation processes, and various high-purity liquid precursors.
High Optical Transparency

High transmittance across UV and IR wavelengths; allows for clear visual monitoring of liquid levels and bubbling activity.
Low Outgassing and Impurity Release

No volatile impurities released at high temperatures; ensures process stability and high production yields.

3-port Quartz Bubbler Quartz Source Bottle Wet Oxygen Bottle (2)

Application Areas

Semiconductor Industry: Silicon wafer diffusion and oxidation processes (wet oxidation); CVD/ALD precursor delivery.
Photovoltaic Industry: Phosphorus diffusion for solar cells; containment of POCl₃ (phosphorus oxychloride) sources.
Scientific Research Laboratories: Gas-phase reactions, gas scrubbing, bubbling absorption, and photocatalysis experiments.
Advanced Materials: MOCVD, vapor deposition, and specialty gas delivery systems.

Product Advantages

- All-quartz welded construction; no adhesives used; no risk of bond failure or outgassing at high temperatures.

- Fully customizable dimensions based on customer drawings: volume, neck design, tube apertures, tube lengths, and connection styles can all be tailored to specific needs.

- Precision-polished inner walls; minimizes liquid adsorption and particle adhesion.

- Clean packaging; compatible with pickling and ultrasonic cleaning to meet high-purity process requirements.

3-port Quartz Bubbler Quartz Source Bottle Wet Oxygen Bottle (3)

3-port Quartz Bubbler Quartz Source Bottle Wet Oxygen Bottle (4)

Product Highlights

High-purity quartz material with extremely low impurity levels.
Resistant to high temperatures and acid/alkali corrosion.
Three-port design with dedicated inlet and outlet connections.
Integrated welded construction ensuring excellent sealing and zero leakage.
Transparent chamber allowing real-time monitoring of liquid levels and bubbling status.
Supports custom specifications (non-standard designs).
Applications: Semiconductor manufacturing, photovoltaic diffusion, and wet oxidation processes.

FAQ

Q: Can volume and tube length be customized?

A: Yes, available from 50ml to 5000ml. Tube length & bore size can be customized per drawing.
Q: What is max working temperature? Can it sustain thermal cycles?

A: Continuous working temp up to 1100℃, peak 1200℃. Repeated thermal cycles acceptable under proper operation, avoid sharp temperature shock.
Q: Is acid cleaning service available?

A: Yes, acid cleaning & clean packing available for semiconductor grade requirement.

Packaging and Shipping

Why Choose Southeast Quartz?

Southeast Quartz relies on the superior high-quality quartz ore resources in Donghai County, deeply engages in the deep processing of quartz glass, and has become a core supplier to global customers. All products undergo multiple tests such as helium mass spectrometry leak detection, pressure resistance test, and purity test before leaving the factory to ensure stable performance, no impurities, and no leakage.